Nanofabrication through forming: Techniques and mechanics

Exploiting the plastic deformability of materials to manufacture components is widely applied in automobile, aerospace, consumer electronics, medical equipment, and other fields. With the development trend of device miniaturization, nanofabrication techniques plays a central role in the manufacturing industry. In recent years, extensive research and remarkable progress have been made in developing micro-/nanoforming techniques, and in-depth understanding of the underlying deformation behavior. This paper will review the latest research progress of micro-/nanoforming techniques, focusing on the deformation mechanism and size effect in the micro-/nanoforming of different material classes such as polymers, amorphous alloys/bulk metallic glass, and crystalline metals. Finally, the technical challenges and key mechanical problems of micro-/nanoforming of crystalline metals are prospected.

Nano-Fabrication Methods

Nanofabrication through forming: Techniques and mechanics

Advances in top–down and bottom–up surface nanofabrication: Techniques, applications & future prospects - ScienceDirect

Nanofabrication Process - an overview

9 Nanotechnology Trends in 2024

增材制造TC4钛合金的动态力学行为研究

Nanofabrication through forming: Techniques and mechanics

Micromachines, Free Full-Text

Evaluation of Local Mechanical and Chemical Properties via AFM as a Tool for Understanding the Formation Mechanism of Pulsed UV LaserNanoinduced Patterns - NANOscientific - The Magazine for Nanotechnology

Nanomaterials, Free Full-Text

What is MEMS Technology?

Top-down nanofabrication process steps of silicon nanowires using EBL.