Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

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a) Fabrication procedure of the PDMS soft mold from the Si master (A)

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Effective broadband electromagnetic wave absorption performance of nano-Fe3O4 magnetic fluid-modified resin geopolymer by metamaterial with a novel patterned structure - ScienceDirect

Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H

Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

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Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect

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