Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect
a) Fabrication procedure of the PDMS soft mold from the Si master (A)
SU-8 mold lithography - Elveflow
Master Mold - an overview
Micromachines, Free Full-Text
Effective broadband electromagnetic wave absorption performance of nano-Fe3O4 magnetic fluid-modified resin geopolymer by metamaterial with a novel patterned structure - ScienceDirect
Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H
Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices
Nanoimprint lithography for nanodevice fabrication
Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect
PDF) Nanoimprint Lithography
Epoxy resin mold and PDMS microfluidic devices through
Materials, Free Full-Text