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The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.
Micromachines, Free Full-Text
Micromachines, Free Full-Text
Micro Machines Museum - Micro Machines Museum
Micromachines, Free Full-Text, mdpope 1-3
DC/DC Converters: Devices Capable of Converting to Higher or Lower Voltage - Technical Articles, boost converter
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Forests, Free Full-Text, mdpope 1-3
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Cerium oxide based materials for water treatment – A review, Cerium Oxide
Micromachines, Free Full-Text