Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Secondary control loops of the HRG including Quadrature Control Loop

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

a) The structure of Zr 32 N 31 O (blue atoms: Zr, yellow atoms: N, red

PDF) Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Analytical and experimental study of stress effects in a MEMS ring gyroscope - ScienceDirect

Fabrication process flow for the anisotropically wet-etched pitch/roll

PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units

A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes - ScienceDirect

Primary control loops of the HRG including Phase-lock Loop (PLL) and

PDF) Eigenmode operation of piezoelectric resonant gyroscopes

Figure 3 from Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes

Eigenmode operation of piezoelectric resonant gyroscopes

Frequency response of SD-BAW gyroscope at pickoff electrodes aligned